|
1일차
1. Photo Lithography
-Coating & Bake
-Exposure
-Develop
-Mask & PR
2. ETCH
-Etch rate / uniformity
-Selectivity
-Directionality
-Loading effect |
|
1일차
1. Diffusion (ALD)
-Introduction
-Diffusion Process
-Oxidation & annealing
2. Ion Implantation
-Implantation Process
-Implantation Hardware
-Implantation System
-Projected Range |
|
2일차
1. Clean
-Cleaning Definition
-Chemical Treatment
-Hydrophilic / Hydrophobic
-Particle Remove
2. CMP
-CMP Process
-CMP Equipment
-Oxide / Metal CMP
-Cu CMP |
|
2일차
1. CVD
-Thin film Deposition
-Aspect Ratio & Step Coverage
-CVD Reaction
-Thin Film Filling Issue
2. Metal (EP)
-PVD Introduction
-Evaporation
-Sputtering
-EP Process |
